Using Low CTE Materials to Manufacture Reliable Stacked Microvia Structures
In the last few years there have been concerns in the industry especially in the products requiring high reliability when using microvia structures. As a result many fabricators have been mandating push back on complex high layer count designs which has resulted in very conservative rules for designers to use and meet the fabricators capabilities. Some fabricators have also struggled to ensure even simple structures are built reliably and with repeatability. This study was to look at materials which would ensure that more complex structures could be built reliably. Traditional thin fiberglass reinforced dielectric layers can have issues with the lack of resin movement through spread glass necessitating higher resin to glass ratios for the manufacture of stacked microvias. Current industry practice has been to limit designs to staggered vias or to 1-2 layers of stacked microvias. This work extending a previous study presented at Apex 2022 1 will show how a thin hydrocarbon dielectric layer can be used and optimized for stacked microvias that demonstrates solid thermal reliability up to 5 levels of HDI. It also shows there seems to be no indication yet of a ceiling on how many layers could be used and introduces buried vias and how they affect the reliability for offset versus direct attach of via structures.