Innovative Electroplating Processes for IC Substrates - Via Fill,Through Hole Fill and Embedded Trench Fill

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In this era of electronics miniaturization,high yield and low cost integrated circuit (IC) substrates play a crucial role by providing a reliable method of high density interconnection of chip to board. In order to maximize substrate real-estate,the distance between Cu traces also known as line and space (L/S) should be minimized. Typical PCB technology consists of L/S larger than 40 µm,whereas more advanced wafer level technology currently sits at or around 2 µm L/S. In the past decade,the chip size has decreased significantly along with the L/S on the substrate. The decreasing chip scales and smaller L/S distances has createdunique challenges for both printed circuit board (PCB) industry and the semiconductor industry. Fan-out panel-level packaging (FOPLP) is a new manufacturing technology that seeks to bring the PCB world and IC/semiconductor world even closer. While FOPLP is still an emerging technology,the amount of high-volume production in this market space provide a financial incentive to develop innovative solutions in order to enable its ramp up. The most important performance aspect of the fine line plating in this market space is plating uniformity or planarity. Plating uniformity,trace/via top planarity,which measures how flat the top of the traces and vias area few major features. This is especially important in multilayer processing,as nonuniformity on a lower layer can be transferred to successive layers,disrupting the device design with catastrophic consequences such as short circuits. Additionally,a non-planar surface could also result in signal transmission loss by distortion of the connecting points,like vias and traces. Therefore,plating solutions that provide a uniform,planar profile without any special post treatment are quite desirable.
Here we discuss innovative additive packages for direct-current copper electroplating specifically for IC substrates with capabilities such as embedded trench fill and simultaneous through hole plating and via filling with enhanced pattern plate.
These new solutions not only offer better trace profile,but also deliver via fill and through hole plating. Here we describe two electrolytic copper plating processes,the selection of which could be based on the via size and the dimple requirements of the application. Process I offers great via fill for deeper vias up to 80 – 120 µm diameter and 50 – 100 µm deep. Process II is more suitable for shallow smaller vias 50 – 75 µm diameter and 30 – 50 µm deep. In this paper we show that these two processes provide excellent surface uniformity and trace profile while also providing via filling and through hole plating capabilities when controlled within given parameters. Process optimization and thermal and physical characterization of the metallization is also presented.

Author(s)
Saminda Dharmarathna,Sy Maddux,Chao Benjamin,Ivan Li,William Bowerman,Kesheng Feng,Jim Watkowski
Resource Type
Technical Paper
Event
IPC APEX EXPO 2019

Filling of Microvias and Through Holes by Electrolytic Copper Plating - Current Status and Future Outlook

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The electronics industry is further progressing in terms of smaller,faster,smarter and more efficient electronic devices. This continuous evolving environment caused the development on various electrolytic copper processes for different applications over the past several decades.
There are 4 main drivers which forced the chemical supply industry to introduce new electrolytic copper processes with the new feature of “filling” capability over the years. The 1st driver is the continuous miniaturization of electronics. The first blind microvias were introduced with HDI technology in the late 1980s and early 1990s. In 1996,the IC Substrate market started to fill the micro vias. “Plugging” technologies were introduced in order to stack the micro vias to save space or to create “via in Pad” structures. This “plugging” technology with conductive paste was very expensive because of the additional process steps required.
Today copper filled microvias are the standard for almost all HDI PCB manufacturers. The 2nd driver is the thermal management on a substrate. Solutions were needed to integrate features with high thermal conductivity to manage the heat transfer on the substrates from one side to the other in order to minimize hot spots on the electronic devices over a lifetime. The higher the chip performance is,the more it tends to generate local heat-spots resulting in an early loss of the electronics in the field. The reason for this is the degeneration of various materials at these local hot spots.
Meanwhile the complete copper filled through holes was realized in 2006,by bridge plating or X -plating technology. Nowadays,completely copper filled through hole structures are at the leading edge of technology for thermal via structures because copper has almost the best thermal conductivity and it has to be plated nonetheless. The 3rd driver is the signal frequency. Electronic signals in an electronic package or inside of a PCB are increasing over time and continue to do so. Stacked microvias and fan-out vias are becoming more and more of a disadvantage for the transmission of high frequency signals,due to the fact of creating resistances at high frequencies. Therefore,the push of high frequency applications further increased the demand for technologies like copper filled through holes.
The 4th driver especially for through hole filling,is the quality-yield aspect. The alternatives for electroplated copper filled through holes,requires many additional process steps,or new materials such as plugging pastes. Each of these additional process steps or materials introduces a variety of risks and manufacturing problems resulting in lower yield. Therefore the “one step” solution to fill through holes with copper is the preferred solution,without introducing new materials into the PCB. This paper describes the reasons for development and a roadmap of dimensions for copper filled through holes,microvias and other copper plated structures on PCBs. The paper will contain aspect ratios,dimensions and results of plated through holes used today in high volume manufacturing for microvia and through hole filling with electroplated copper. Furthermore,it will also show feasibility studies of new electroplated structures for future applications such as copper pillar plating on IC-substrates.

Author(s)
Mustafa Özköt,Sven Lamprecht,Akif Özkök,Dolly Akingbohungbe,Moody Dreiza
Resource Type
Technical Paper
Event
IPC APEX EXPO 2019

Robust Reliability Testing for Drop-on-Demand Jet Printing

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In this study,the question was how to perform statistically reliable robust- ness tests for the non-contact drop-on-demand printing of functional fluids,such as solder paste and conductive adhesives. The goal of this study was to develop a general method for hypothesis testing when robustness tests are performed. The main problem was to determine if there was a statistical difference between two means or proportions of jet printing devices. In this study,an example of jetting quality variation was used when comparing two jet printing ejector types that differ slightly in design. We wanted to understand if the difference in ejector design can impact jetting quality by performing robustness tests. and thus answer the question,"Can jetting differences be seen between ejector design 1 and design 2"?

Author(s)
Gustaf Martensson,Patrik Mirzai
Resource Type
Technical Paper
Event
IPC APEX EXPO 2019

Dispensing EMI Shielding Materials: An Alternative to Sputtering

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Shielding electronic systems against electromagnetic interference (EMI) has become a hot topic. Technological advancements toward 5G standards,wireless charging of mobile electronics,in-package antenna integration,and system-in-package (SiP) adoption are driving the need to apply more effective EMI shielding and isolation to component packages and larger modules. For conformal shielding,EMI shielding materials for exterior package surfaces have mostly been applied with a physical vapor deposition (PVD) process of sputtering,leveraging front-end packaging technologies to back-end packaging applications. However,sputtering technology challenges in scalability and cost along with advancements in dispensable materials are driving considerations for alternative dispensing techniques for EMI shielding. The authors will discuss development of a spray coating process to apply EMI shielding materials to the exterior surfaces of individual components on strips and larger SiP packages. Using newly developed and enhanced materials and equipment for this industry,a process was demonstrated that provided uniform coating on packages in the sub-10µm thickness range with consistent coating thicknesses around package corners and package sidewalls,producing a top surface-to-sidewall thickness ratio of 1:1. Further investigation showed decreased production costs for applying EMI shielding to component packages by increasing spray-coating productivity and by selectively applying the coating to specific areas of packages. Additionally,low capital-equipment expense and shorter lead times for spray coating equipment improved the ability to scale up production capacity compared to sputtering equipment. In mobile electronics packaging,several SiP-module manufacturers are challenged to isolate components within the SiP from each other and from their exterior for EMI shielding. Trenches are cut around the interior components and conductive paste is dispensed into the trenches to form smaller Faraday cages within the package. As trench designs become narrower,it becomes imperative to control both the volume and placement accuracy of the material filling the trenches. The latest,advanced jetting products provide control of the volume while the narrow,in-air stream width delivers accurate trench-fill. In a final step,the tops of these paste-filled trenches are connected by applying exterior EMI shield coating. Spraying overcomes challenges faced when using sputtering equipment and harnesses the improvements in both the EMI shielding materials and the equipment for depositing it,so that SiP packages can be manufactured using efficient back-end packaging techniques.

Author(s)
Garrett Wong,Jinu Choi
Resource Type
Technical Paper
Event
IPC APEX EXPO 2019