Peroxy-Sulfuric Oxide Replacements – A Pathway to Improved Technology for Fine Line Processes
Traditional reduced black oxide processes for inner layer bonding have been superseded by a newer generation of peroxidesulfuric
texturing processes. These lower cost processes,based on an organically controlled microetch,have proven to be
simpler,faster,and more energy efficient. They have eliminated traditional problems such as: re-oxidation caused by baking
and storage,high resistance shorts and pink ring defects.
However,the relentless trend of miniaturization and the inexorable pressures for cost reduction continue to push the
envelope. Lower etch factors are necessary for controlled impedance and fine line applications,and higher copper loadings
are a prerequisite for increased capacity / reduced cost of ownership. The paper describes the major challenges faced,and the
resulting technical progression which has been achieved,to evolve the next generation of high performance processes capable
of meeting this target.