Aqueous Base Compatible Waveguide Materials for Optical Interconnect Applications
There are a number of organic,inorganic,and hybrid inorganic waveguide materials that are currently being used for
a wide variety of optical interconnect applications. Depending upon the approach,waveguide formation is
performed using a combination of lithographic and/or reactive ion etch (RIE) techniques. Often the processes
involved with waveguide formation require unique processing conditions,hazardous process chemicals,and
specialized pieces of capital equipment. In addition,many of the materials have been optimized for silicon substrates
but are not compatible with printed wire board (PWB) substrates and processes.
We have developed compositions and processes suitable for the creation of optical,planar waveguides on both
silicon and PWB substrates. Based on silicate technology,these compositions use lithographic techniques to define
waveguides,including aqueous,alkaline development. The resulting planar waveguides take advantage of the glasslike
nature of silicate chemistry wedded with the simplicity of standard lithographic processes. Attenuation at typical
wavelengths has been found to compete well with the non-silicate-based technologies available today. Single-mode
(SM) and multi-mode (MM) waveguides with losses ranging from 0.5 dB/cm @ 1550nm,0.15 dB/cm @1320nm,
and <0.1 @ 850nm are feasible. Composition,process and physical properties such as optical,thermal and
mechanical properties will be discussed.