Semiconductor Technology ITRS Roadmap
For four decades,the semiconductor industry has distinguished itself by the rapid pace of improvement in its products. The
principal categories of improvement trends are shown in Table 1 with examples of each. Most of these trends have resulted
principally from the industry’s ability to exponentially decrease the minimum feature sizes used to fabricate integrated
circuits. Of course,the most frequently cited trend is in integration level,which is usually expressed as Moore’s Law. (i.e.,
the number of components per chip doubles every 24 months). The most significant trend for society is the decreasing costper-
function,which has led to significant improvements of productivity and quality of life through proliferation of computers,
electronic communication,and consumer electronics.