Micro Bump Array Constructions on the Organic Substrates for the Non-Permanent Terminations
A series of electrical plating processes to build various kinds of micro bump arrays on the organic substrates has been developed for non-permanent connections. Copper bump arrays with nickel/hard gold plating on the organic substrate with small pitches have been required for the non-
permanent terminations. Electrical test probes of the semiconductors and micro size components have been demanding reliable micro bumps on the organic substrates for the repeated contacts of more than one million times. Several combinations of the micro hole generation processes and the electrical plating processes have been developed to
satisfy the requirements. The new electrical plating processes are capable of building the micro bump arrays with copper,
nickel and hard gold for pitches smaller than 50 microns on the substrates of FR-4 boards and polyimide films with epoxy or polyimide insulation layers. The plating processes provide broad choices for the shapes and heights of the micro bumps with copper,nickel and gold. Several drilling processes have been introduced to generate small holes with high dimensional accuracy for the exact alignment of the micro bumps on the narrow traces. A series of studies were conducted to review the capability of the drilling process. The whole process has a broad capability for the all kind of organic substrates. A set of design guidelines has been introduced to optimize the productivity.