Aerosol-Based Direct Writing of Interconnects
Optomec is developing an aerosol-based technology for high-precision,maskless deposition of a wide variety of
materials. The system functions by atomizing commercial inks and pastes,and then depositing the droplets under
CAD/CAM control. Feature sizes of 25 microns and smaller are achieved and millimeter-scale tool standoff allows
non-contact deposition into vias,trenches,and three-dimensional geometries. The compatible materials include a
variety of commercial metals,resistors,dielectrics,and polymers as well as custom specialty materials. The
materials can be laser sintered or thermally cured and are compatible with ceramic and glass substrate as well as
various low-temperature substrates such as epoxy circuit board and flexible polymer film. This technology is called
Maskless Mesoscale Materials Deposition (M3D).