This paper presents systematic investigations on complete Through Hole filling for cores by a Cu electroplating process as an alternative to the common paste plugging process. This electro plating process consists of two steps,a first process to merge both centers of the through hole walls (X- plating) followed by filling up the resulting Blind Micro Vias. Processes and manufacturing technology are described as well as current limitations and requirements. Complete filling of through holes is achieved by Reversed Pulse Plating,RPP. This Through Hole filling technology is targeting both at HDI production and also at the packaging level.
Through Hole filling by RPP offers a viable alternative to the standard paste plugging for core processing in substrate manufacturing. Current core manufacturing requires a paste plugging process for through holes so that subsequent build up layers can be produced by sequential lamination,the flat core surface is essential for stacked via and also via in pad technology.
This paste plugging process requires additional process steps,each of which has its own limitations and contributes to the overall cost. Filling the core through vias by electroplating can eliminate the plugging process and significantly reduces the number of overall process steps which will also reduce costs. Moreover,it offers certain advantages such as potentially higher reliability in accelerated aging tests and an improved thermal management as the thermal conductivity of a completely copper filled through via is significantly higher than a paste plugged through via.
Today’s challenges in the so called Through Hole Filling process are represented by through holes with a high aspect ratio. Voids after X-Plating occur easily for smaller through hole diameter and higher board thickness. In addition,depending on designs,different pitches on one board increase the difficulty to achieve an acceptable plating uniformity. This paper presents systemic variations of some key parameters and concentrates on the performances of the second plating step,the blind micro vias filling. Main focus is laid on recess distribution. Parameters as reverse pulse parameters,inorganic concentrations (Cu,Fe,and sulfuric acid),organic concentrations,electrolyte flow and temperature have been systematically varied and their influence on the filling performance are described.
Author(s)
Nina Dambrowsky,Christof Erben,Stephen Kenny,Bernd Roelfs,Mike Palazzola